Research ArticleOpen accessPhrase in the titleDisplacement of Boron from the Silicon Crystal Nodes by Interstitial Si Atoms During Implantation and AnnealingM. Jadan, A. R. Chelyadinskii, V. Y. YavidAmerican Journal of Applied Sciences, Vol. 2, Issue 5 · 31 May 2005 · 6,983 accessesView PDFCite
2 articles for “interstitial Si atoms”
Set a search alertResearch ArticleOpen accessEvery word in the titleModel of High-Temperature Diffusion of Interstitial Silicon Atoms in SiliconM. Jadan, A. R. Chelyadinskii, V. Yu. YavidAmerican Journal of Applied Sciences, Vol. 6, Issue 6 · 30 Sep 2009 · 6,862 accessesView PDFCite