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8 articles for “DC/RF Magnetron Sputtering”
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Research ArticleOpen accessEvery word in the titleHigh Deposition Rate of Dual-cathode DC Unbalanced Magnetron SputteringTheeranon Chaiyakun, Wuttichai Phae-Ngam, Jedsada PrathumsitDual-cathode dc unbalanced magnetron sputtering for the deposition of ternary compound films with a high deposition rate was designed and constructed. It consists of two magnetrons of opposite magnetic polarities. Each magnetron consists of central and outer ring magnets with the residual inductions of 500 and 600 mT, respectively. The testing results of the system showed that high plasma volume … …American Journal of Applied Sciences, Vol. 17, Issue 1 · 14 Oct 2020 · 7,205 accessesView PDFCite
Research ArticleOpen accessEvery word in the titleProperties of ZnO:Ga Thin Films Deposited by dc Magnetron Sputtering: Influence of Ga-Doped Concentrations on Structural and Optical PropertiesPutut Marwoto, Edy Wibowo, Dwi Suprayogi et al.ZnO:Ga thin films were deposited on corning glass by dc magnetron sputtering. Influence of Ga-doped concentrations on the structural and optical properties of ZnO:Ga thin films were investigated. The XRD patterns show that the crystallinity of deposited films improved with the increase of Ga concentrations from 1 to 2%, then decrease at 3% Ga concentrations. The optical transmittance of films … …American Journal of Applied Sciences, Vol. 13, Issue 12 · 14 Dec 2016 · 7,477 accessesView PDFCite
Research ArticleOpen accessIn the keywordsThermal Treatment Effects on the Thermoelectric Properties of Ni/Si/Si + Sb/Si/Si + Ge/Ni Multilayer Thin FilmsSatilmis Budak, Zhigang Xiao, Shujun YangThe multilayer thermoelectric devices including Ni/200 layers of Si/Si + Sb/200 layers of Si/Si + Ge/Ni thin films were fabricated using electron beam and DC/RF magnetron sputtering deposition systems. The thickness measurements have been performed using Filmetrics UV thickness measurement system. The Au contacts at the bottom and top of the fabricated thermoelectric devices were measured as 100 nm for … …American Journal of Engineering and Applied Sciences, Vol. 13, Issue 4 · 14 Nov 2020 · 6,710 accessesView PDFCite
Research ArticleOpen accessIn the abstractXPS Studies of the SiO2 Substrates and Thermoelectric Thin Films of Sn/Sn+SnO2 under the Effects of the Different Thermal TreatmentsRichard Lagle, Stephen Egarievwe, Satilmis Budak, Mebougna DraboMultilayered thermoelectric Sn/Sn+SnO2 thin films were prepared using KJL DC/RF magnetron sputtering system under Ar gas plasma on the SiO2 substrates. The thicknesses of the fabricated thin films were found using Filmetrics UV thickness measurement system. The fabricated thin films were annealed at different temperatures for one hour to tailor the thermoelectric properties. In this study, unannealed, annealed at 150 … …American Journal of Engineering and Applied Sciences, Vol. 14, Issue 1 · 9 Jan 2021 · 8,209 accessesView PDFCite
Research ArticleOpen accessIn the abstractThermoelectric and Optical Properties of Advanced Thermoelectric Devices from Different Multilayer Thin FilmsMebougna Drabo, Satilmis BudakThermoelectric devices were prepared using different multilayered thin film structures in the order of Ge/Si+Ge, Si+Ge, Si, Sb+Ge, Ge and SiO2/SiO2+Ge by DC/RF Magnetron Sputtering. The thickness of the deposited thin films were measured using Filmetrics UV thickness measurement system. The prepared thermoelectric devices have been modified with 5 MeV Si ions bombardments at the different fluences (doses) using Pelletron … …American Journal of Applied Sciences, Vol. 16, Issue 8 · 29 Aug 2019 · 8,113 accessesView PDFCite
Research ArticleOpen accessIn the abstractOptical and Structure Analysis of ZnO:Al FilmNeilo Marcos Trindade, Michel Chaves, José Roberto Ribeiro Bortoleto et al.ZnO and ZnO:Al are wide-bandgap semiconductors which have many applications, mainly as transparent conducting films. Thin films of these compounds were deposited onto glass and silicon substrates by RF magnetron sputtering for the investigation of structural and optical characteristics. The XRD results show that the films present wurtzite structure. The formation of a polycrystalline film having a preferential crystallographic orientation … …American Journal of Engineering and Applied Sciences, Vol. 10, Issue 4 · 5 Oct 2017 · 7,855 accessesView PDFCite
Research ArticleOpen accessIn the abstractFrom Structural Colors to Super-Hydrophobicity and Achromatic Transparent Protective Coatings: Ion Plating Plasma Assisted TiO2 and SiO2 Nano-Film DepositionRaffaella Aversa, Valeria Perrotta, Relly Victoria V. Petrescu et al.The implementation of the Ion Plating Plasma Assisted technology in the area of surface functionalization for structural color and relic preservation applications is presented. Interferometric structural colors on irregular bumped Titanium surfaces and transparent and achromatic nano films on ancient ceramic artifact have been investigated. Titanium metal and ceramic supports have been utilized for the surface functionalization tests: A metallic … …American Journal of Engineering and Applied Sciences, Vol. 9, Issue 4 · 24 Nov 2016 · 8,459 accessesView PDFCite
Research ArticleOpen accessIn the abstractHighly-Efficient Advanced Thermoelectric Devices from Different Multilayer Thin FilmsSatilmis Budak, Zhigang Xiao, Barry Johnson et al.The efficiency of the thermoelectric materials and devices is shown by the dimensionless Figure of merit, ZT. ZT is calculated by multiplying the Seebeck coefficient with square of the electrical conductivity and absolute temperature and dividing it all by the thermal conductivity. Thermoelectric devices were prepared using different multilayered thin film structures in the order of SiO2/SiO2 + Ge/Ge/Sb + … …American Journal of Engineering and Applied Sciences, Vol. 9, Issue 2 · 27 Apr 2016 · 8,368 accessesView PDFCite