3 articles for “semiconductor manufacturing process”

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Research ArticleOpen accessEvery word in the titleOptimal Pareto Solutions of a Dynamic C Chart: An Application of Statistical Process Control on a Semiconductor Devices Manufacturing ProcessToni Lupo, Filippo SgroiThe present paper proposes a novel economic-statistical design procedure of a dynamic c control chart for the Statistical Process Control (SPC) of the manufacturing process of semiconductor devices. Particularly, a non-linear constrained mathematical programming model is formulated and solved by means of the ϵ-constraint method. A numerical application is developed in order to describe the Pareto frontier, that is the … …American Journal of Applied Sciences, Vol. 12, Issue 4 · 28 May 2015 · 6,473 accessesView PDF Cite

Research ArticleOpen accessIn the keywordsStudy on Contact Forms in Wafer Chemical Mechanical Polishing in NanomachiningSu Jianxiu, Du Jiaxi, Chen Xiqu, Kang RenkeChemical Mechanical Polishing (CMP) has become the most widely used planarization technology in the semiconductor manufacturing process. Problem statement: Studying the Contact Forms in Wafer Chemical Mechanical Polishing. Approach: A series test on the abrasion behavior and the lubricating behavior was conducted and then the test results were investigated by the abrasion and lubrication theory. Results: By the test results … …Current Research in Nanotechnology, Vol. 1, Issue 2 · 21 Jun 2011 · 7,282 accessesView PDF Cite

Research ArticleOpen accessIn the abstractConstrained Response Surface Optimization for a Laser Beam Welding ProcessPongchanun LuangpaiboonProblem statement: On a current operating condition of a laser beam welding process in the hard disk drive industry, it has been found that shear strength of the head support and suspension assembly is slightly higher than customers' specification. This situation leads to an inspection with a large sample size and a high frequency. Shear strength is not only one … …Journal of Mathematics and Statistics, Vol. 7, Issue 1 · 29 Jan 2011 · 7,368 accessesView PDF Cite