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Physics International

ISSN 1948-9803 (print)eISSN 1948-9811 (online) Open access
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Research Article · Open access · Published 17 July 2013

THE STRUCTURE AND MECHANICAL PROPERTIES OF ALUMINA FILM PREPARED BY RF DIODE SPUTTERING

H. Panitchakan, P. Limsuwan
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  1. doi:10.1142/s0218625x16500165Found 12 June 2020