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Current Research in Nanotechnology

ISSN 1949-0216 (print)eISSN 1949-0224 (online) Open access
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Research Article · Open access · Published 21 June 2011

Study on Contact Forms in Wafer Chemical Mechanical Polishing in Nanomachining

Su Jianxiu, Du Jiaxi, Chen Xiqu, Kang Renke
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  1. doi:10.4028/www.scientific.net/amr.1027.235Found 12 June 2020