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American Journal of Applied Sciences

ISSN 1546-9239 (print)eISSN 1554-3641 (online) Open access
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Research Article · Open access · Published 30 April 2005

Localization of Implanted Impurities in Silicon

M. Jadan, Jihad S.M. Addasi
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  1. doi:10.1021/cm502083vFound 12 June 2020