Research ArticleOpen accessIn the keywordsLow-g Area-changed MEMS Accelerometer Using Bulk Silicon TechniqueBadariah Bais, Burhanuddin Yeop MajlisA bulk micromachined accelerometer based on an area variation capacitive sensing for low-g applications was developed. The accelerometer was designed with ribbed-style fingers structure on the movable mass connected in parallel and suspended over stationary electrodes composed of differential comb fingers by means of suspension beams anchored onto the substrate. A folded, rigid truss suspension design with low spring constant … …American Journal of Applied Sciences, Vol. 5, Issue 6 · 30 Jun 2008 · 7,630 accessesView PDFCite