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2 results for “Silicon Photonics”

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Research ArticleOpen accessIn the keywordsEffect of Low Temperature on the Fabrication of Microring Resonator by Wet EtchingHazura Haroon, Sahbudin Shaari, P. Susthitha Menon et al.Research related to semiconductor devices often relies on wafer fabrication. The fabrication of Silicon (Si) based devices by anisotropic wet etching can be affected by many etching parameters such as etching temperature, crystal orientation and percent of composition. Most of the anisotropic wet etchings by KOH solution done before were conducted at temperature over 70°C. We found that the temperatures … …American Journal of Applied Sciences, Vol. 9, Issue 12 · 7 Nov 2012 · 7,126 accessesView PDFCite
Research ArticleOpen accessIn the abstractEffect of Doping Position on the Active Silicon-on-Insulator Micro-Ring Resonator Based on Free Carrier InjectionB. Mardiana, Sahbuddin Shaari, P. Susthitha Menon et al.Problem statement: Metal interconnects have become significant limitation on the scaling of CMOS technologies in electronics integrated circuit. Silicon photonics has offers great potential to overcome this critical bottleneck due to the advantages of optical interconnects. Silicon-based optical micro-ring resonator is promising basic element of future electronic-photonic integrated circuits because of its wide applications on photonic devices such as modulator, … …American Journal of Applied Sciences, Vol. 9, Issue 9 · 9 Aug 2012 · 7,342 accessesView PDFCite