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Research ArticleOpen accessPhrase in the titleEffect of Low Temperature on the Fabrication of Microring Resonator by Wet EtchingHazura Haroon, Sahbudin Shaari, P. Susthitha Menon et al.Research related to semiconductor devices often relies on wafer fabrication. The fabrication of Silicon (Si) based devices by anisotropic wet etching can be affected by many etching parameters such as etching temperature, crystal orientation and percent of composition. Most of the anisotropic wet etchings by KOH solution done before were conducted at temperature over 70°C. We found that the temperatures … …American Journal of Applied Sciences, Vol. 9, Issue 12 · 7 Nov 2012 · 7,126 accessesView PDF Cite

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