
American Journal of Applied Sciences
ISSN 1546-9239 (print)eISSN 1554-3641 (online) Open access
Research Article · Open access · Published 14 October 2020
High Deposition Rate of Dual-cathode DC Unbalanced Magnetron Sputtering
Theeranon Chaiyakun, Wuttichai Phae-Ngam, Jedsada PrathumsitSince publication
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Citing articles (4)
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- doi:10.1016/j.vacuum.2026.115870Found 8 October 2026
- doi:10.1016/j.jallcom.2025.180430Found 16 April 2025
- doi:10.1016/j.materresbull.2025.113301Found 10 January 2025
- doi:10.1016/j.optmat.2024.115166Found 18 March 2024