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American Journal of Applied Sciences

ISSN 1546-9239 (print)eISSN 1554-3641 (online) Open access
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Research Article · Open access · Published 30 June 2008

Characterization of Boron Carbonitride (BCN) Thin Films Deposited by Radiofrequency and Microwave Plasma Enhanced Chemical Vapor Deposition

M.A. Mannan, M. Nagano, K. Shigezumi et al.
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  18. doi:10.1016/j.matchemphys.2018.08.019Found 12 June 2020
  19. doi:10.1016/j.jlumin.2018.04.029Found 12 June 2020