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Research Article · Open access · Published 30 June 2008

Low-g Area-changed MEMS Accelerometer Using Bulk Silicon Technique

Badariah Bais, Burhanuddin Yeop Majlis
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12Citations (Crossref)

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Citing articles (12)

Read from Crossref’s cited-by service every week, newest first.

  1. doi:10.1038/s41598-026-60204-7Found 14 October 2026
  2. doi:10.1177/01423312241257812Found 27 July 2024
  3. doi:10.1007/s12008-024-02003-wFound 16 July 2024
  4. doi:10.1007/s00542-022-05278-9Found 4 April 2022
  5. doi:10.1088/1361-6439/ab9b13Found 17 July 2020
  6. doi:10.1007/s00542-020-04776-yFound 12 June 2020
  7. doi:10.3390/s17092158Found 12 June 2020
  8. doi:10.1364/ao.58.004211Found 12 June 2020
  9. doi:10.1007/s00542-018-04292-0Found 12 June 2020
  10. doi:10.12989/sss.2014.13.6.959Found 12 June 2020
  11. doi:10.1007/s00542-013-1741-zFound 12 June 2020
  12. doi:10.1007/s00542-010-1146-1Found 12 June 2020