
American Journal of Applied Sciences
ISSN 1546-9239 (print)eISSN 1554-3641 (online) Open access
Research Article · Open access · Published 30 June 2008
Low-g Area-changed MEMS Accelerometer Using Bulk Silicon Technique
Badariah Bais, Burhanuddin Yeop MajlisSince publication
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12Citations (Crossref)
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Citing articles (12)
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- doi:10.1038/s41598-026-60204-7Found 14 October 2026
- doi:10.1177/01423312241257812Found 27 July 2024
- doi:10.1007/s12008-024-02003-wFound 16 July 2024
- doi:10.1007/s00542-022-05278-9Found 4 April 2022
- doi:10.1088/1361-6439/ab9b13Found 17 July 2020
- doi:10.1007/s00542-020-04776-yFound 12 June 2020
- doi:10.3390/s17092158Found 12 June 2020
- doi:10.1364/ao.58.004211Found 12 June 2020
- doi:10.1007/s00542-018-04292-0Found 12 June 2020
- doi:10.12989/sss.2014.13.6.959Found 12 June 2020
- doi:10.1007/s00542-013-1741-zFound 12 June 2020
- doi:10.1007/s00542-010-1146-1Found 12 June 2020