Characterization of Transparent Conductive Thin Films of In2O3:Sn by Spray Pyrolysis Technique

Highly conductive transparent In₂O₃:Sn (ITO) thin films were prepared onto glass substrate using the spray pyrolysis technique. It is observed that these films are polycrystalline with the preferred orientation of [400]. The extent of this orientation increases with substrate temperature. The results show that films with a sheet resistance as low as 35Ω/cm² and with a transmittance as high as 90% in visible range can be achieved by controlling the substrate temperature and other preparation process.