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Research ArticleOpen accessIn the keywordsNanoscale Pitch Standards Sample Fabricated using Laser-Focused Atomic DepositionYan Ma, Tongbao Li, Yajun Zhao et al.Problem statement: Nanotechnology is already a large sector of industry and science research and it is expected to continue to grow at very fast rate. The determination of absolute measurements of length at the nanometer scale and below is very difficult and expensive. So the nanoscale metrology standard is needed. Approach: The laser-focused atomic deposition is a new way to … …Current Research in Nanotechnology, Vol. 2, Issue 2 · 3 Sep 2012 · 7,249 accessesView PDF Cite

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