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Research ArticleOpen accessMolecular Dynamics Investigation of Cutting Force in Nanometric Cutting of Monocrystalline SiliconY.H. Chen, F.Z. Fang, X.D. Zhang, X.T. HuProblem statement: Ultra-precision machining of monocrystalline silicon has become tremendously important in microelectronic, micromechanical and optical element manufacturing and the mechanism of nanometric cutting monocrystalline silicon has been a focused research topic. Molecular Dynamics (MD) simulation is developed as an effective way for studying the material removal process at nanometric scale. Approach: Molecular Dynamics (MD) simulation of nanometric cutting is … …Current Research in Nanotechnology, Vol. 1, Issue 2 · 21 Jun 2011 · 8,403 accessesView PDF Cite