Author

Burhanuddin Yeop Majlis

Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, 43600 Bangi, Selangor, Malaysia

2 articles in our journals

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Research ArticleOpen accessEffect of Low Temperature on the Fabrication of Microring Resonator by Wet EtchingHazura Haroon, Sahbudin Shaari, P. Susthitha Menon et al.Research related to semiconductor devices often relies on wafer fabrication. The fabrication of Silicon (Si) based devices by anisotropic wet etching can be affected by many etching parameters such as etching temperature, crystal orientation and percent of composition. Most of the anisotropic wet etchings by KOH solution done before were conducted at temperature over 70°C. We found that the temperatures … …American Journal of Applied Sciences, Vol. 9, Issue 12 · 7 Nov 2012 · 7,126 accessesView PDF Cite

Research ArticleOpen accessLow-g Area-changed MEMS Accelerometer Using Bulk Silicon TechniqueBadariah Bais, Burhanuddin Yeop MajlisA bulk micromachined accelerometer based on an area variation capacitive sensing for low-g applications was developed. The accelerometer was designed with ribbed-style fingers structure on the movable mass connected in parallel and suspended over stationary electrodes composed of differential comb fingers by means of suspension beams anchored onto the substrate. A folded, rigid truss suspension design with low spring constant … …American Journal of Applied Sciences, Vol. 5, Issue 6 · 30 Jun 2008 · 7,630 accessesView PDF Cite