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Research ArticleOpen accessIn the keywordsUnderstanding Material Deformation in Nanoimprint of Gold using Molecular Dynamics SimulationsAbhaysinh Gaikwad, Salil DesaiMaterial deformation in nanoimprinting is explored through Molecular Dynamics (MD) simulations. Understanding the behavior of substrate material during the nanoimprinting process is imperative for high resolution nanoscale pattern transfer. Nanoimprinting of the gold has the potential to make significant impact in diverse areas such as microelectronics and biomedical research. The deformation of gold during nanoimprinting is studied for varying depths … …American Journal of Engineering and Applied Sciences, Vol. 11, Issue 2 · 24 May 2018 · 8,710 accessesView PDF Cite

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