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2 results for “Shujun Yang”
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Research ArticleOpen accessIn the author namesThermal Treatment Effects on the Thermoelectric Properties of Ni/Si/Si + Sb/Si/Si + Ge/Ni Multilayer Thin FilmsSatilmis Budak, Zhigang Xiao, Shujun YangThe multilayer thermoelectric devices including Ni/200 layers of Si/Si + Sb/200 layers of Si/Si + Ge/Ni thin films were fabricated using electron beam and DC/RF magnetron sputtering deposition systems. The thickness measurements have been performed using Filmetrics UV thickness measurement system. The Au contacts at the bottom and top of the fabricated thermoelectric devices were measured as 100 nm for … …American Journal of Engineering and Applied Sciences, Vol. 13, Issue 4 · 14 Nov 2020 · 6,710 accessesView PDFCite